Out of stock

GEMÜ C53 iComLine Motorized control valve (88707103)

Name: GEMÜ C53 iComLine Motorized control valve (88707103)
Brand: Gemü
SKU: GEM.88707103
Price: 3173.08 EUR
Availability: OutOfStock

SKU: GEM.88707103

3.173,08 €

incl. 19% VAT plus

Net: 2.666,45 €

Manufacturer information:

GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG
Fritz-Müller-Straße 6–8
Baden-Württemberg
Ingelfingen, Deutschland, 74653
info@gemue.de
https://www.gemu-group.com/

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The GEMÜ C53 iComLine 2/2-way diaphragm globe valve was developed for precise and demanding control applications in semiconductor production. The sealing concept of the valve is based on the tried and tested GEMÜ PD technology, whereby actuator and medium are separated by a PTFE regulating cone. As the regulating cone contour, actuator stroke and connection size can be customized to meet customers' requirements, the GEMÜ C53 iComLine satisfies virtually all control and flow requirements of the semiconductor industry. The precise stepper motor, in conjunction with the ultra pure body materials, is particularly suitable for lithography, CMP, and etching processes, as well as analytical applications in semiconductor production. More product details

Description
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Product Information

HAN:	88707103
Category:	GEMÜ C53 iComLine Motorized control valve
Werkstoff Ventilkörper:	24 V DC
Type:	Plastic globe valve, electric
Gehäuseform:	Zweiwege-Durchgangskörper
Connection type:	Flare connection with PFA union nut
Actuator version:	Actuator size 2 Seat size 9,55 mm
Control module:	Positioner 0-10V Error position close
Voltage / Frequency:	24 V DC
High Purity version:	High Purity
Connection size:	3/4", international code: 12
Regulating cone:	1 m³/h - linear

Product Description

C5312D7730 5C1V12AR3235 HP / 88707103

Description

Features

Control valve for ultra pure applications in the semiconductor industry
High-resolution linear actuator with stepper motor
Diaphragm globe valve based on the iComLine series
Tried and tested plug diaphragm design
All media wetted parts are made of PFA or PTFE
1 million qualified control switching cycles
Cleanroom manufacturing (HP version), complies with SEMI F 57

Technical specifications

Media temperature :	10 to 150 °C
Media temperature :	10 to 150 °C
Ambient temperature:	0 to 40 °C
Operating pressure :	0 to 6 bar
Connection sizes:	1/4'' to 3/4''
Body configurations:	2/2-way body
Connection types:	Flare \| PrimeLock® \| Super 300 Type Pillar®
Body materials:	PFA \| PTFE
Seal material:	PTFE
Supply voltage:	24 V DC
Input signals:	–10 V \| 4–20 mA
Actuating speed:	Max. 2 mm/s
Protection class:	IP65

Contact data

E-Mail*

Manufacturer according to GPSR
GEMÜ Gebr. Müller Apparatebau GmbH & Co. KG, Fritz-Müller-Straße 6–8, 74653 Ingelfingen, Baden-Württemberg, Deutschland, info@gemue.de, https://www.gemu-group.com/